Advanced 316L stainless steel or nickel filter media
Superior particle removal efficiency with minimal pressure loss
Supports high flow rates for its size
Excellent gas displacement and release characteristics
High temperature and pressure tolerance
Compact design for easy installation
Diverse fitting options available
100% helium leak-tested for quality assurance
Manufactured and packaged in a cleanroom environment
Housing material meets or exceeds VIM VAR specifications
وصف
The Ultramet-L 4281/4581 Series Filter Assemblies, featuring an all 316L stainless steel housing and either a 316L stainless steel or nickel filter, are designed for ≥ 1.5 nanometer (0.001.5 μm) filtration of semiconductor grade gases. These filters are recommended for applications with process gases compatible with 316L stainless steel or nickel. For corrosive gases like halogen containing acid gases, the nickel filter assembly is recommended only if the gas is known to be anhydrous.